Russia Invests in Home Grown X-Ray Lithography Tech...

[John Larkin]

On Sat, 9 Apr 2022 13:55:57 -0400, Phil Hobbs
<pcdhSpamMeSenseless@electrooptical.net> wrote:

On 4/8/22 7:33 PM, Ed Lee wrote:
On Friday, April 8, 2022 at 4:15:55 PM UTC-7, Mike Monett wrote:
John Larkin <jlarkin@highland_atwork_technology.com> wrote:

On Fri, 8 Apr 2022 20:31:53 -0000 (UTC), Mike Monett <spa...@not.com
wrote:

John Larkin <jlarkin@highland_atwork_technology.com> wrote:

[...]

What stuns me is that the various parts of a modern wafer scanner
(formerly called a stepper) like mask, lens, and wafer, are in
continuous motion during exposure. To sub-nm precision.

And euv is not even coherent light, just an emission line from blasted
tin droplets.

Thanks. I often wondered how they could start and stop a massive moving
weight, then wait for the vibrations to cease, expose and start moving
again. Repeat every 5nm. That is not going to work.

The solution is don\'t stop. Why didn\'t I think of that.

Now you need femtosecond accuracy in the clocks. That brings it to
Time-Nuts domain:

https://febo.com/pipermail/time-nuts_lists.febo.com/

The lens of an EUV system looks like a diesel engine. Nothing refracts
13 nm light so the lens is a mess of shaped grazing-incidence metal
things with movers and benders. I think Zeiss makes it.
Apparently the beam is focused and directed by mirrors

How Carl Zeiss Crafts Optics for a $150 Million EUV Machine
https://www.youtube.com/watch?v=V__HbVlnICc

The next level is 1nm. I wonder if they use the same method.

1nm chip manufacturing factory! TSMC has once again set a world first!
https://www.youtube.com/watch?v=hBqTefFHCio

Someone commented:
\"This is a totally fabricated story. TSMC has never announced anything about the 1 nm node.\"

I agree. 3nm is more likely.


Too bad. It\'ll be great when we reach 0 nm--infinite computing power!

Cheers

Phil Hobbs

That would improve Spice some.

--

If a man will begin with certainties, he shall end with doubts,
but if he will be content to begin with doubts he shall end in certainties.
Francis Bacon

 

[boB]

On Fri, 08 Apr 2022 07:44:36 -0700, jlarkin@highlandsniptechnology.com
wrote:

On Fri, 08 Apr 2022 10:14:07 GMT, Jan Panteltje
pNaonStpealmtje@yahoo.com> wrote:

Russia Invests in Home Grown X-Ray Lithography Tech
https://www.tomshardware.com/news/russia-invests-in-home-grown-x-ray-lithography-tech

$8M is about a tenth of a percent of what ASML and Gigaphoton invested
in EUV. Looks like ASML won.

Nobody needs xrays to get 28 nm features. DUV laser light is fine, and
a heap easier to make.

People played with nm-range synchrotrons and plasma sources ages ago,
but the power was too low for production. So far, only tin droplets
work.

I doubt that the russkies have the resources to make nm ic\'s.

Mostly true. As Ed Lee said before, 65 nm is about it so far anyway.

Why Russia Can’t Replace TSMC
https://www.youtube.com/watch?v=N_4R4X7AWtU


boB