ruledeck for strain-induced mismatch in silicon

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eda support guy

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Hi All,

There has been a few empirical studies of the effect of a metal track
(in M1) close to a differential pair on mismatch. What I have never seen
though, is a systematic study. At first sight, one needs only to know :
- thermal expansion coefficient of metal, oxide, and silicon
- elastic properties of the same materials (Young's modulus, etc...)
- piezo effect in silicon (the relation between strain and bandgap )

and it is possible to calculate this effect.

Has anyone seen papers that present this, or better: ruledeck that
directly calculate this effect ?
 

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