extraction of capacitances: COEFFGEN

[dati_remo@libero.it]

I use this file to create the Diva.rul extraction file with coeffgen.

***************************************************************************
*NAME TYPE PERMITTIVITY THICKNESS MIN_WIDTH MIN_SPACING
****************************************************************************
BOTTOM_TO_TOP
LENGTH_UNIT um
bkgnd ground -INF
oxsp dielectric 2.249 0.270
poly conductor 6.472 0.209 0.256 0.267
ox11pm1 dielectric 7.420 0.055
ox12pm1 dielectric 7.474 0.324
metal1 conductor 3.922 0.302 0.270 0.330
oxm21m2 dielectric 8.583 0.044
oxm22m2 dielectric 4.962 0.324
metal2 conductor 2.922 0.406 0.124 0.270
oxnitr dielectric 5.360 0.860
air dielectric 1.0 INF


The problem is that the capacitances which are extracted are too big,
about 600-700mF!!

Someone can help me?

Thanks.